DRAM cell fabricated using a modified logic process and method for operating same

ABSTRACT

A memory system that includes a dynamic random access memory (DRAM) cell that includes an access transistor and a storage capacitor. The storage capacitor of the DRAM cell is fabricated by forming a polysilicon crown electrode, a dielectric layer overlying the polysilicon crown, and a polysilicon plate electrode overlying the dielectric layer. A first set of thermal cycles are performed during the formation of the storage capacitor to form and anneal the elements of the capacitor structure. After the first set of thermal cycles are complete, shallow P+ and/or N+ regions are formed by ion implantation, and metal salicide is formed. As a result, the relatively high first set of thermal cycles required to form the capacitor structure does not adversely affect the shallow P+ and N+ regions or the metal salicide. A second set of thermal cycles, which are comparable to or less than the first set of thermal cycles, are performed during the formation of the shallow regions and the metal salicide. The DRAM cell is operated in response to a word line driver that is controlled to provide a positive boosted voltage and a negative boosted voltage to the word line, thereby controlling access to the DRAM cell. The positive boosted voltage is greater than V dd  but less than V dd  plus the absolute value of a transistor threshold voltage V t . Similarly, the negative boosted voltage generator is less than V SS  by an amount less than V t .

RELATED APPLICATIONS

The present application is a continuation-in-part of commonly owned U.S. patent application Ser. No. 09/332,757, “ON-CHIP WORD LINE VOLTAGE GENERATION FOR DRAM EMBEDDED IN LOGIC PROCESS” by Wingyu Leung and Fu-Chieh Hsu, filed Jun. 14, 1999 now U.S. Pat. No. 6,147,914.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to Dynamic Random Accessible Memory (DRAM). More particularly, this invention relates to DRAM fabricated by slightly modifying a conventional logic process. This invention further relates to the on-chip generation of precision voltages for the operation of DRAM embedded or fabricated using a conventional logic process.

2. Related Art

FIG. 1A is a schematic diagram of a conventional DRAM cell 100 that is fabricated using a conventional logic process. FIG. 1B is a cross sectional view of DRAM cell 100. As used herein, a conventional logic process is defined as a semiconductor fabrication process that uses only one layer of polysilicon and provides for either a single-well or twin-well structure. DRAM cell 100 consists of a p-channel MOS access transistor 1 having a gate terminal 9 connected to word line 3, a drain terminal 17 connected to bit line 5, and a source terminal 18 connected to the gate 11 of a p-channel MOS transistor 2. The connection between source terminal 18 and the gate 11 undesirably increases the layout area of DRAM cell 100. P-channel transistor 2 is configured to operate as a charge storage capacitor. The source and drain 19 of transistor 2 are commonly connected. The source, drain and channel of transistor 2 are connected to receive a fixed plate bias voltage V_(pp). The V_(pp) voltage is a positive boosted voltage that is higher than the positive supply voltage V_(dd) by more than a transistor threshold voltage V_(t).

As used herein, the electrode of the charge storage capacitor is defined as the node coupled to the access transistor, and the counter-electrode of the charge storage capacitor is defined as the node coupled to receive a fixed plate bias voltage. Thus, in DRAM cell 100, the gate 11 of transistor 2 forms the electrode of the charge storage capacitor, and the channel region of transistor 2 forms the counter-electrode of the charge storage capacitor.

To improve soft-error-rate sensitivity of DRAM cell 100, the cell is fabricated in an n-well region 14 which is located in a p-type substrate 8. To minimize the sub-threshold leakage of access transistor 1, n-well 14 is biased at the V_(pp) voltage (at n-type contact region 21). However, such a well bias increases the junction leakage. As a result, the bias voltage of n-well 14 is selected such that the sub-threshold leakage is reduced without significantly increasing the junction leakage. When storing charge in the storage capacitor, bit line 5 is brought to the appropriate level (i.e., V_(dd) or V_(SS)) and word line 3 is activated to turn on access transistor 1. As a result, the electrode of the storage capacitor is charged. To maximize the stored charge, word line 3 is required to be driven to a negative boosted voltage V_(bb) that is lower than the supply voltage V_(SS) minus the absolute value of the threshold voltage (V_(tp)) of access transistor 1.

In the data retention state, access transistor 1 is turned off by driving word line 3 to the V_(dd) supply voltage. To maximize the charge storage of the capacitor, the counter electrode is biased at the positive boosted voltage V_(pp). The plate voltage V_(pp) is limited by the oxide breakdown voltage of the transistor 2 forming the charge storage capacitor.

DRAM cell 100 and its variations are documented in U.S. Pat. No. 5,600,598, entitled “Memory Cell and Wordline Driver For Embedded DRAM in ASIC Process,” by K. Skjaveland, R. Township, P. Gillingham (hereinafter referred to as “Skjaveland et al.”), and “A 768k Embedded DRAM for 1.244 Gb.s ATM Switch in a 0.8 um Logic Process,” P. Gillingham, B. Hold, I. Mes, C. O'Connell, P. Schofield, K. Skjaveland, R. Torrance, T. Wojcicki, H. Chow, Digest of ISSCC, 1996, pp. 262-263 (hereinafter referred to as “Gillingham et al.). Both Skjaveland et al. and Gillingham et al. describe memory cells that are contained in an n-well formed in a p-type substrate.

FIG. 2 is a schematic diagram of a word line control circuit 200 including a word line driver circuit 201 and a word line boost generator 202 described by Gillingham et al. Word line control circuit 200 includes p-channel transistors 211-217, inverters 221-229, NAND gates 231-232 and NOR gate 241, which are connected as illustrated. Word line driver 201 includes p-channel pull up transistor 211, which enables an associated word line to be pulled up to the V_(dd) supply voltage. P-channel pull down transistors 212-217 are provided so that the word line can be boosted down to a negative voltage (i.e., −1.5V) substantially below the negative supply voltage V_(SS). However, the p-channel pull down transistors 212-217 have a drive capability much smaller (approximately half) than an NMOS transistor of similar size. As a result, the word line turn on of Gillingham et al. is relatively slow (>10 ns). Furthermore, in the data retention state, word line driver 201 only drives the word line to the V_(dd) supply voltage. As a result, the sub-threshold leakage of the access transistor in the memory cells may not be adequately suppressed.

DRAM cells similar to DRAM cell 100 have also been formed using n-channel transistors fabricated in a p-type well region. To maximize stored charge in such n-channel DRAM cells during memory cell access, the associated word line is driven to a voltage higher than the supply voltage V_(dd) plus the absolute value of the threshold voltage (V_(tn)) of the access transistor. In the data retention state, the n-channel access transistor is turned off by driving the word line to V_(SS) supply voltage (0 Volts). To maximize the charge storage of the capacitor in an n-channel DRAM cell, the counter electrode is biased at a plate voltage V_(bb) that is lower than the V_(SS) supply voltage.

A prior art scheme using n-channel DRAM cells includes the one described by Hashimoto et al. in “An Embedded DRAM Module using a Dual Sense Amplifier Architecture in a Logic Process”, 1997 IEEE International Solid-State Circuits Conference, pp. 64-65 and 431. A p-type substrate is used, such that the memory cells are directly in contact with the substrate and are not isolated by any well structure. In the described design, substrate bias is not permitted. Moreover, application of a negative voltage to the word line is not applicable to ASICs that restrict substrate biasing to be zero. Consequently, the architecture achieves a negative gate-to-source voltage (V_(gs)) by limiting bit line swing. The negative V_(gs) voltage reduces sub-threshold leakage in the memory cells. Hashimoto et al. fails to describe the structure of the word line driver.

It would therefore be desirable to have a word line driver circuit that improves the leakage currents in DRAM cells fabricated using a conventional logic process. Moreover, it would be desirable to have improved methods for biasing DRAM cells fabricated using a conventional logic process.

SUMMARY

Accordingly, the present invention provides a memory system that includes a dynamic random access memory (DRAM) cell, a word line, and a CMOS word line driver fabricated using a conventional logic process.

In another embodiment of the present invention, a DRAM cell is fabricated by slightly modifying a conventional logic process. In this embodiment, the DRAM cell is fabricated by forming the gate electrode of an access transistor from a first conductive layer, and then forming a capacitor structure. In one embodiment, the capacitor structure is fabricated by forming a crown electrode of a capacitor structure from a second conductive layer, forming a dielectric layer over the crown electrode, and then forming an plate electrode over the dielectric layer from a third conductive layer. A first set of thermal cycles are performed during the formation of the capacitor structure. After the capacitor structure has been formed, P+ and/or N+ ion implantations are performed, thereby forming shallow junctions on the chip (e.g., a drain region of the access transistor). Salicide is subsequently formed over the resulting structure. A second set of thermal cycles are performed to activate the implanted P+ and/or N+ impurities and the salicide. In the described embodiment, the second set of thermal cycles are comparable or less than the first set of thermal cycles. Because the first set of thermal cycles are performed prior to forming the N+ and P+ shallow junctions and salicide, the N+ and P+ shallow junctions and salicide are not adversely affected by the first set of thermal cycles.

In a particular embodiment, the crown electrode has a base region with vertical walls that extend upward from the base region. A dielectric layer, such as ONO, is located over the crown electrode. The plate electrode is located over the dielectric layer, such that the plate electrode extends over at least the interior surfaces of vertical walls of the crown electrode. The plate electrode can additionally extend over the exterior surfaces of the vertical walls of the crown electrode. The configuration of the crown electrode and plate electrode advantageously results in a DRAM cell having a small layout area.

The word line driver is controlled to selectively provide a positive boosted voltage and a negative boosted voltage to the word line, thereby controlling access to the DRAM cell.

A positive boosted voltage generator is provided to generate the positive boosted voltage, such that the positive boosted voltage is greater than the V_(dd) supply voltage but less than the V_(dd) supply voltage plus the absolute value of a transistor threshold voltage V_(t).

Similarly, a negative boosted voltage generator is provided to generate the negative boosted voltage, such that the negative boosted voltage is less than the V_(SS) supply voltage, but greater than the V_(SS) supply voltage minus the absolute value of a transistor threshold voltage V_(t).

A coupling circuit is provided between the word line driver and one of the positive or negative boosted voltage generators. For example, if the DRAM cell is constructed from PMOS transistors, then the coupling circuit couples the word line driver to the negative boosted word line generator. When the DRAM cell is being accessed, the coupling circuit couples the word line driver to the negative boosted voltage, thereby turning on the p-channel access transistor of the DRAM cell. However, when the DRAM cell is not being accessed, the coupling circuit couples the word line driver to the V_(SS) supply voltage, thereby minimizing leakage currents associated with the negative boosted voltage.

In this embodiment, the coupling circuit can be configured to provide the V_(SS) supply voltage to the word line driver when the word line is first activated. When the voltage on the word line falls below the V_(dd) supply voltage, the coupling circuit provides the negative boosted voltage to the word line driver.

Conversely, if the DRAM cell is constructed from NMOS transistors, then the coupling circuit couples the word line driver to the positive boosted word line generator. When the DRAM cell is being accessed, the coupling circuit couples the word line driver to the positive boosted voltage, thereby turning on the n-channel access transistor of the DRAM cell. However, when the DRAM cell is not being accessed, the coupling circuit couples the word line driver to the V_(dd) supply voltage, thereby minimizing leakage currents associated with the positive boosted voltage.

In this embodiment, the coupling circuit can be configured to provide the V_(dd) supply voltage to the word line driver when the word line is first activated. When the voltage on the word line rises above the V_(SS) supply voltage, the coupling circuit provides the positive boosted voltage to the word line driver.

The positive boosted voltage generator includes a charge pump control circuit that limits the positive boosted voltage to a voltage less than V_(dd) plus V_(t). Similarly, the negative boosted voltage generator includes a charge pump control circuit that limits the negative boosted voltage to a voltage greater than V_(SS) minus V_(t). The positive and negative boosted voltages are limited in this manner because, for normal logic applications using sub 0.25 micron processes, the gate oxide breakdown voltage is usually less than a threshold voltage V_(t) above the positive supply voltage V_(dd).

The positive boosted voltage generator includes a charge pump control circuit that limits the positive boosted voltage to a voltage that is greater than the V_(dd) supply voltage by less than one transistor threshold voltage. In one embodiment, this charge pump control circuit includes a first p-channel transistor having a source coupled to the V_(dd) supply voltage and a drain coupled to a first reference current source. The gate of the first p-channel transistor is coupled to the gate of a second p-channel transistor. The first and second p-channel transistors have first and second channel widths, respectively, wherein the second channel width is greater than the first channel width. A second reference current source is coupled to the drain of the second p-channel transistor. The drain of the second p-channel transistor provides an inhibit control signal for the charge pump control circuit. A third p-channel transistor has a gate and a drain connected to a source of the second p-channel transistor, and a source coupled to receive the positive boosted voltage. The ratio of the first and second channel widths is selected such that the inhibit control signal is asserted when positive boosted voltage is less than one transistor threshold voltage greater than the V_(dd) supply voltage. In one embodiment, the first reference current source has a negative temperature coefficient to compensate for temperature effects of the second p-channel transistor. The second reference current source can be provided with a positive temperature coefficient to compensate for temperature effects of the third p-channel transistor.

Similarly, the negative boosted voltage generator includes a charge pump control circuit that limits the negative boosted voltage to a voltage that is less than the V_(SS) supply voltage by less than one transistor threshold voltage V_(t). In one embodiment, this charge pump control circuit includes a first n-channel transistor having a source coupled to the V_(SS) supply voltage and a drain coupled to a first reference current source. The gate of the first n-channel transistor is coupled to the gate of a second n-channel transistor. The first and second n-channel transistors have first and second channel widths, respectively, wherein the second channel width is greater than the first channel width. A second reference current source is coupled to the drain of the second n-channel transistor. The drain of the second n-channel transistor provides an inhibit control signal for the charge pump control circuit. A p-channel transistor has a source coupled to the source of the second n-channel transistor, and a drain and gate coupled to receive the negative boosted voltage. The ratio of the first and second channel widths is selected such that the inhibit control signal is asserted when negative boosted voltage is greater than the V_(SS) supply voltage minus the absolute value of a transistor threshold voltage V_(t). In one embodiment, the first reference current source has a negative temperature coefficient to compensate for temperature effects of the second n-channel transistor. The second reference current source can be provided with a positive temperature coefficient to compensate for temperature effects of the p-channel transistor.

The present invention will be more fully understood in view of the following description and drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1A is a schematic diagram of a conventional DRAM memory cell formed by p-channel MOS transistors fabricated using a conventional logic process.

FIG. 1B is a cross sectional diagram of the DRAM memory cell of FIG. 1A.

FIG. 2 is a schematic diagram of a conventional word line control circuit, including a word line driver and a word line voltage generator.

FIG. 3A is a schematic diagram of a DRAM memory cell that is supplied by voltage sources in accordance with one embodiment of the present invention.

FIG. 3B is a cross sectional view of the DRAM memory cell of FIG. 3A.

FIG. 3C is a layout view of the DRAM memory cell of FIG. 3A in accordance with one embodiment of the present invention.

FIG. 3D is a cross sectional view of the DRAM memory cell of FIG. 3A in accordance with another embodiment of the present invention.

FIGS. 4A-4J are cross sectional views of a DRAM cell in accordance with another embodiment of the present invention during various stages of fabrication;

FIG. 5 is a schematic diagram of a word line driver in accordance with one embodiment of the present invention.

FIG. 6 is a block diagram illustrating a word line driver system that includes a first plurality of word line drivers, a second plurality of V_(SSB) coupling circuits, a V_(CCB) voltage generator and a V_(BBS) voltage generator in accordance with one embodiment of the present invention.

FIG. 7 is a schematic diagram of a V_(SSB) coupling circuit in accordance with one embodiment of the present invention.

FIG. 8 is a waveform diagram illustrating various signals generated during the operation of the V_(SSB) coupling circuit of FIG. 7.

FIG. 9A is a block diagram of V_(CCB) and V_(SSB) boosted voltage generators in accordance with one embodiment of the present invention.

FIG. 9B is a simplified schematic diagram of a charge pump control circuit used in a conventional positive boosted voltage generator.

FIG. 9C is a simplified schematic diagram of a charge pump control circuit used in a conventional negative boosted voltage generator.

FIG. 10 is a schematic diagram of a V_(CCB) charge pump control circuit in accordance with the one embodiment of the present invention.

FIG. 11 is a schematic diagram of a V_(BBS) charge pump control circuit in accordance with the one embodiment of the present invention.

FIGS. 12-17 are schematic diagrams of reference current sources in accordance with various embodiments of the present invention.

FIG. 18 is a schematic diagram of a word line driver and a V_(BBC) voltage coupling circuit in accordance with an embodiment of the present invention that uses NMOS transistors to form the DRAM cells.

DETAILED DESCRIPTION

Except where specifically noted, the following describes the voltages and biasing of a DRAM memory fabricated using a conventional logic process which is a single or twin well process with a single polycrystalline silicon layer and one or more layers of metal. In the described examples, the positive supply voltage is designated as supply voltage V_(dd). In general, the positive supply voltage V_(dd) can have a nominal value such as 3.3 Volts, 2.5 Volts, 1.8 Volts, etc., depending on the fabrication process. The ground supply voltage, having a nominal value of 0 Volts, is designated as supply voltage V_(SS).

As shown in FIG. 3A, a DRAM memory cell used in one embodiment consists of a p-channel access transistor 301 and a p-channel storage transistor 302 that is configured as a storage capacitor. The gate of the access transistor 301 is connected to word line 303 and the drain of access transistor 301 is connected to bit line 305. The source of access transistor 301 is coupled to the source region of transistor 302. In the described embodiment, only the source region of transistor 302 is actually formed (i.e., there is no drain region of transistor 302). In another embodiment, both the source and drain regions are formed, and these regions are commonly connected to the source of access transistor 301. The channel of transistor 302 forms the electrode of the storage capacitor, and the gate of transistor 302 forms the counter-electrode of the storage capacitor. The channel of storage transistor 302 (i.e., the electrode of the storage capacitor) is coupled to the source of access transistor 301. The gate of transistor 302 (i.e., the counter-electrode of the storage capacitor) is connected to receive a negative boosted bias voltage V_(bb1). The bias voltage V_(bb1) is limited by the break-down voltage (V_(bd)) of the gate oxide of capacitor 302 and the highest voltage (V₁) stored on the electrode. In general, bias voltage V_(bb1) is set to a voltage that is greater than V₁ minus V_(bd). In the preferred embodiment, V₁ is equal to the positive supply voltage V_(dd), and bias voltage V_(bb1) is set to −0.3 Volts.

In general, the bias voltage V_(bb1) is selected to have a magnitude less than one diode voltage drop. That is, the bias voltage V_(bb1) is selected to have a magnitude less than about 0.7 Volts. The negative bias voltage V_(bb1) linearizes the operation of storage capacitor 302 by increasing the capacitance of capacitor 302 when the electrode is charged to the V_(dd) supply voltage. Without the negative plate bias V_(bb1), the capacitance of capacitor 302 tends to decrease rapidly as the voltage across the capacitor becomes smaller than the threshold voltage of the MOS structure.

As illustrated in FIG. 3B, DRAM memory cell 300 is contained in an n-doped well 304 of a p-type monocrystalline silicon substrate 306. Multiple memory cells can share the same n-well 304. N-well 304 is biased to a boosted positive voltage (V_(pp1)) that is greater than the V_(dd) supply voltage by a voltage that is approximately equal to the absolute value of the threshold voltage (V_(tp)) of p-channel access transistor 301. In addition, the boosted positive voltage V_(pp1) is selected to be lower than the oxide break down voltage of p-channel access transistor 301. N-well 304 is biased by a connection to n-type contact region 315. In the present embodiment, the V_(pp1) voltage is controlled to be approximately 0.3 Volts greater than the V_(dd) supply voltage (i.e., V_(tp)=0.3 Volts). Applying the V_(pp1) voltage to n-well 304 decreases the sub-threshold leakage of access transistor 301, and minimizes the possibility of forward biasing the junction between the electrode of capacitor 302 and n-well 304 due to supply noise. However, applying the V_(pp1) voltage to n-well 304 also increases the junction leakage at the electrode of storage capacitor 302, especially at higher voltages.

When data is written to memory cell 300, bit line 305 is coupled to the V_(dd) supply voltage to write a logic zero data value, or to the V_(SS) supply voltage to write a logic one data value. In addition, word line 303 is coupled to receive a word line voltage V_(SSB), which has a potential of about −0.3 Volts. In accordance with one embodiment, the V_(SSB) voltage level is chosen to be −0.2 Volts to −0.6 Volts, as compared to −1.0 Volts or more negative in a traditional DRAM implementation. Generation of the V_(SSB) voltage is described in more detail below.

When memory cell 300 is in the data retention state, bit line 305 is pre-charged to a voltage of about one half the V_(dd) supply voltage. Sub-threshold leakage of memory cell 300 tends to be higher when bit line 305 or the electrode of capacitor 302 is at a potential close to the V_(dd) supply voltage. This sub-threshold leakage is more severe for sub-micron transistors because of their lower threshold voltages (e.g., V_(tp)=−0.5 Volts). To reduce the sub-threshold leakage during the data retention state, word line 303 is coupled to an internally generated positive boosted voltage (V_(CCB)) which has a potential about 0.3 Volts greater than the V_(dd) supply voltage. In accordance with one embodiment, the V_(CCB) voltage level is chosen to be 0.2 Volts to 0.6 Volts greater than the V_(dd) supply voltage. This is different from the conventional memory cells described above, in which the word line is coupled to the V_(dd) supply voltage during the data retention state. Generation of the positive boosted voltage V_(CCB) is described in more detail below.

FIG. 3C shows the layout of memory cell 300 in accordance with one embodiment of the present invention. The connection to bit line 305 is shared between two neighboring cells, and the upper plate 313 of capacitor 302 connects two rows of adjacent cells parallel to the wordline. The capacitors of adjacent cells are electrically isolated through field oxide (FOX) region 314, e.g., at the minimum spacing allowed by the design rules. Because capacitor plate 313 is biased at the V_(bb1) level to allow the maximum turn-on of the p-channel capacitor, a worse case biasing exists over field oxide (FOX) 314 with maximum leakage current that can flow between neighboring cell storage nodes. To minimize such field leakage current, the capacitor plate 313 is allowed to cross-over field oxide 314 only along diagonal corners of adjacent storage nodes. This forces the possible leakage path between adjacent cells to be 1.414 times the minimum FOX isolation spacing, and at the same time reduces the portion of the storage node perimeter (at minimum spacing) that is adversely gated by the capacitor plate 313 to be less than 25% of the total storage node perimeter (which is the channel region of capacitor 302) and thereby minimizes possible leakage current.

FIG. 3D shows an enlarged cross-section view of p-channel access transistor 301 and p-channel capacitor 302 in accordance with another embodiment of the present invention. In this embodiment, the normal p-type heavy source/drain implant and the source/drain salicidation are excluded from the p-type connecting region 312. This arrangement reduces junction leakage current as well as gate-induced drain leakage (GIDL) that can degrade the charge retention time of the storage node. In a conventional logic process, the formation of a p-channel transistor usually follows the sequence of (i) patterning and etching the polysilicon gate, (ii) using ion implantation to lightly dope the source/drain regions right at the gate edges, thereby forming p-LDD regions, (iii) forming insulating sidewall spacers, (iv) forming salicide (self-aligned silicide) on the exposed silicon surfaces, and (v) using ion implantation to heavily dope the source/drain regions on the exposed silicon surfaces, thereby forming p-S/D regions. The two-step formation of the p-LDD and p-S/D regions provide for high conduction current and good leakage current control at the same time. The p-S/D region is usually much more heavily doped to have low resistivity than the p-LDD region. As a result, the junction breakdown voltage is lower and leakage current of the p-S/D region is much higher than that of the p-LDD region. The source/drain salicide reduces the source/drain resistivity further but also degrades the junction leakage further. Therefore, it is important to exclude as much heavy p-type doping and salicide formation in the storage node (i.e., region 312) as possible.

In the present invention, region 312 is laid out with minimum polysilicon gate spacing which is comparable to twice the size of the insulating sidewall spacers 325. With this layout arrangement, p-S/D doping and salicide are effectively excluded from region 312 without need for additional processing steps.

The DRAM cell of FIGS. 3A-3D may similarly be implemented using an n-channel access transistor and capacitor, provided that these elements are fabricated in a p-doped well located in either an n-doped substrate or in a deep n-doped well of a p-doped substrate.

FIGS. 4A-4J are cross sectional views of a DRAM cell 40 in accordance with another embodiment of the present invention during various stages of fabrication. In general, DRAM cell 40 includes a capacitor structure having a crown and plate configuration, which is formed using two additional polysilicon layers. These additional polysilicon layers are formed prior to the formation of N+ and P+ shallow junctions and prior to the formation of salicide. Using two additional polysilicon layers enables the formation of a smaller capacitor structure and therefore a smaller DRAM cell.

As illustrated in FIG. 4A, an n-type well region 42 is formed in a p-type monocrystalline silicon substrate 41. In the described example, substrate 41 has a <1, 0, 0> crystalline orientation and a dopant concentration of about 1×10¹⁶/cm³. N-well 42, which is formed by conventional process steps such as ion implantation, has a dopant concentration of about 1×10¹⁷/cm³. Other crystal orientations and concentrations can be used in other embodiments of the invention. In addition, the conductivity types of the various regions can be reversed in other embodiments with similar results.

In the described embodiment, field oxide 45 is formed using shallow trench isolation (STI) techniques. In STI techniques, trenches are etched in silicon substrate 41, and these trenches are then filled with silicon oxide. The upper surface of the resulting structure is then planarized by chemical-mechanical polishing (CMP), such that the upper surface of field oxide 45 is substantially co-planar with the upper surface of n-well 42.

Gate oxide 46 is then thermally grown over the upper surface of the resulting structure. In the described embodiment, gate oxide 46 is silicon oxide having a thickness in the range of about 1.5 to 6.0 nm. However, this thickness can vary depending on the process being used.

A layer of polycrystalline silicon is deposited over the resulting structure. This polysilicon layer is then patterned to form polysilicon gate electrode 47. A P-implant mask (not shown) is then formed, and Boron diflouride (BF₂) is implanted at a dosage of about 1×10¹⁴/cm² and an implant energy of about 15 KeV. Note that the Boron implantation is self-aligned with the edges of polysilicon gate electrode 47.

As illustrated in FIG. 4B, a layer of silicon nitride 48 is then deposited over the resulting structure. In the described embodiment, silicon nitride 48 is deposited to a thickness of about 150 nm using conventional processing techniques. In a particular embodiment, a thin layer (˜20 nm) of oxide is provided under silicon nitride layer 48 to reduce stress. A thick layer of silicon oxide 49 is then deposited over silicon nitride layer 49. In the described embodiment, silicon oxide layer 49 has a thickness of about 1200 nm and is formed using conventional processing techniques.

An opening 60 is formed through silicon oxide layer 49, silicon nitride layer 48 and gate oxide 46. In the described embodiment, opening 60 has a cylindrical shape, with the cylinder having a diameter of about 250 nm. In other embodiments, opening 60 can have other shapes and sizes. Opening 60 is positioned to expose a portion of p-type source region 44.

Opening 60 is created by forming a photoresist mask (not shown) over silicon oxide layer 49, and etching through an opening in the photoresist mask that defines the location and shape of opening 60.

The photoresist mask is stripped, and conductively doped polysilicon layer 50 is formed over the resulting structure. In the described embodiment, polysilicon layer 50 is formed by depositing a layer of polysilicon to a thickness of about 50 nm. Polysilicon layer 50 is then conductively doped by ion implanting a p-type impurity, such as boron diflouride (BF₂), into the polysilicon. Alternatively, polysilicon layer 50 can be doped in situ during deposition. Polysilicon layer 50 extends into opening 60 and contacts p-type source region 44 as illustrated.

As illustrated in FIG. 4C, the upper surface of the resulting structure is planarized. In the described embodiment, a conventional chemical-mechanical polishing (CMP) process is used to perform this planarization step. In general, the planarization step removes the portion of polysilicon layer 50 that is not deposited in opening 60, as well as an upper portion of silicon oxide layer 49. After the planarization step has been performed, a polysilicon crown 51 remains in opening 60. Polysilicon crown 51 includes a substantially planar base region 51A that contacts p-type source region 44 (and field oxide 45). Polysilicon crown 51 also includes vertical walls 51B that extend vertically upward from base region 51A.

As illustrated in FIG. 4D, oxide layer 49 is then removed using an etchant that removes silicon oxide much faster than silicon nitride. This etch step is timed, such that the etchant removes silicon oxide layer 49 without significantly removing silicon nitride layer 48. In the described embodiment, this etchant is buffered or unbuffered hydrofluoric acid. After silicon oxide layer 49 has been removed, polysilicon crown 51 remains, with vertical walls 51B rising above silicon nitride layer 48. In the described embodiment, the walls 51B of polysilicon crown 51 extend about 800 nm above silicon nitride layer 48.

As illustrated in FIG. 4E, an oxide-nitride-oxide (ONO) structure 52 is formed over polysilicon crown 51. This ONO structure 52 is formed by depositing a first silicon oxide layer, a silicon nitride layer, and then a second silicon oxide layer. In the described embodiment, the first silicon oxide layer has a thickness of about 2 nm, the silicon nitride layer has a thickness of about 7 nm, and the second silicon oxide layer has a thickness of about 2 nm. These layers are deposited using well known processing techniques. Relatively high thermal cycles are required to form the various layers of ONO structure 52. For example, a total thermal cycle in the range of 850-950° C. for 20-60 minutes is required to form ONO structure 52. As understood by one of ordinary skill in the art, thermal cycles are a function of both temperature and time.

As illustrated in FIG. 4F, a conductively doped layer of polysilicon 53 is formed over ONO structure 52. In the described embodiment, polysilicon layer 53 is deposited to a thickness of about 150 nm. Polysilicon layer 53 is then conductively doped by ion implanting a p-type impurity, such as boron, into the polysilicon. Alternatively, polysilicon layer 53 can be doped in situ during deposition.

Turning now to FIG. 4G, a photoresist mask 54 is formed over polysilicon layer 53 as illustrated. Photoresist mask 54 is located over polysilicon crown 51 and the immediately adjacent area. As illustrated in FIG. 4H, a series of etches are performed to remove the exposed portions of polysilicon layer 53 and ONO layer 52. The remaining portion of polysilicon layer 53 forms-a polysilicon plate structure 57.

Photoresist mask 54 is then removed, and a thermal cycle is performed to anneal polysilicon layers 51 and 53. During this step, the thermal cycle typically uses rapid thermal annealing (RTA) at relatively high temperatures of 950-1050° C. for 30 to 90 seconds. By performing these high thermal cycles prior to the formation of P+ and N+ shallow junctions and prior to the formation of salicide structures, these high thermal cycles advantageously do not significantly affect these subsequently performed processes.

As illustrated in FIG. 4I, an anisotropic etch is performed on silicon nitride layer 48 using conventional processing techniques. After the anisotropic etch is complete, silicon nitride regions 48A-48C remain. Silicon nitride region 48A forms a sidewall spacer at one edge of polysilicon gate 47. Silicon nitride region 48B forms a sidewall spacer at the opposing edge of polysilicon gate 47. Silicon nitride region 48B extends to the capacitor structure formed by polysilicon crown 51, ONO structure 52 and polysilicon plate 53. Silicon nitride region 48C joins with silicon nitride region 48B outside the plane of FIG. 4I, thereby laterally surrounding polysilicon crown 51.

After silicon nitride regions 48A-48C have been formed, a P+ photoresist mask (not shown) is formed to define the locations of the desired P+ regions on the chip. A P+ type ion implant is then performed, thereby forming shallow P+ drain region 55 (as well as the other desired P+ regions on the substrate). Note that P+ drain region 55 is aligned with the edge of sidewall spacer 48A. In the described embodiment, the P+ ion implant is performed at a dosage of 5×10¹⁵/cm² and an energy of less than 15 KeV. A short annealing thermal cycle is typically performed using RTA at 850 to 950° C. for 10 to 15 seconds.

Turning now to FIG. 4J, a layer of refractory metal, such as titanium or cobalt, is blanket deposited over the resulting structure. In the described embodiment, titanium is deposited to a thickness of about 30 nm. An anneal step is then performed to form the titanium silicide at locations where the titanium contacts silicon. More specifically, the titanium is reacted over P+ region 55, thereby forming titanium salicide region 56A. The titanium is also reacted over polysilicon gate 47, thereby forming titanium salicide region 56B. Finally, the titanium is reacted over polysilicon plate 53, thereby forming titanium salicide region 56C. This anneal also further activates the P+ ions in P+ region 55. In the described embodiment, this thermal cycle is usually performed using RTA at 850 to 950° C. for 10 to 30 seconds. Note that the thermal cycles performed during the formation of the capacitor structure (i.e., 850-950° C. for 20-60 minutes; 950-1050° C. for 30 to 90 seconds) are greater than the thermal cycles performed during the formation of shallow drain region 55 and metal salicide regions 56A-56C (i.e., 850 to 950° C. for 10 to 15 seconds; 850 to 950° C. for 10 to 30 seconds). In accordance with one embodiment of the present invention, the thermal cycles performed during the formation of the shallow drain region 55 and the metal salicide regions 56A-56C are comparable or less than the thermal cycles performed during the formation of the capacitor structure.

An etch is then performed, thereby removing all unreacted portions of the titanium layer (e.g., those portions located of the titanium layer located over silicon nitride regions 48A-48B and field oxide 45).

The resulting DRAM cell 40 is illustrated in FIG. 4J. The access transistor of DRAM cell 40 is formed by drain regions 43 and 55, source region 44, salicide regions 56A-56B, nitride spacers 48A-48B, polysilicon gate electrode 47 and n-well 42. The capacitor structure of DRAM cell 40 is formed by polysilicon crown 51, ONO structure 52, polysilicon plate 57, and salicide region 56C. This capacitor structure has a relatively large surface area between polysilicon crown 51 and polysilicon plate 57, because plate 57 extends over both the interior and exterior surfaces of walls 51B, as well as over base region 51A. This relatively large surface area results in a relatively large capacitance for the capacitor structure. In addition, because the capacitor structure is formed in a vertical manner, the capacitor consumes a relatively small layout area.

In a conventional logic process, the ability to form good N+ and P+ shallow junctions and salicide is predicated on having minimum thermal cycles after the N+ and P+ implantation and the salicide deposition. By forming the capacitor structure, which typically uses higher thermal cycles, prior to the N+ and P+ implantation and salicide formation, the additional thermal cycles introduced by the formation of the capacitor structure will have minimum effects on the characteristics of transistors fabricated after the capacitor structure.

DRAM cell 40 is biased in substantially the same manner as DRAM cell 300 (FIGS. 3A-3D). Thus, salicide region 56A is connected to bit line 305, salicide region 56B is connected to word line 303, and n-well 42 is coupled to the V_(pp1) voltage supply terminal. Salicide region 56C can be connected to any voltage between V_(dd) and V_(SS) to maximize the capacitance of the capacitor structure. Note that the connection to n-well 42 is formed outside the view of FIG. 4J.

FIG. 5 is a schematic diagram of a word line driver 400 used to drive word line 303 in accordance with one embodiment of the present invention. Thus, the output voltages supplied by word line driver 400 are provided to word line 303 (FIG. 3A). Word line driver 400 consists of P-channel transistors 401-402 and N-channel transistors 403-405. To deactivate word line 303, transistor 401 is turned on, thereby pulling word line 303 up to the positive boosted word line voltage V_(CCB). The V_(CCB) word line voltage is high enough to turn off access transistor 301. To activate word line 303, pull-down transistor 403 is turned on, thereby pulling down word line 303 to the V_(SSB) voltage. The generation of the V_(SSB) word line voltage is described in more detail below.

The gate of word line pull-up transistor 401 and the gate of word line pull-down transistor 403 are commonly connected to a pass gate formed by p-channel transistor 402. Transistor 402, when turned on, couples transistors 401 and 402 to receive an output signal X_(i) provided by a row address decoder 410. The gate of transistor 402 is coupled to receive another output signal X_(j)# from row address decoder 410. When the memory cells connected to word line 303 are selected for access, row address decoder 410 first drives the X_(i) signal high, and then drives the X_(j)# signal low. The low state of the X_(j)# signal turns on pass transistor 402, which provides the logic high X_(i) signal to the gates of the pull up and pull down transistors 401 and 403. Under these conditions, pull down transistor 403 is turned on, thereby coupling word line 303 to receive the V_(SSB) word line voltage.

As described in more detail below, row address decoder 410 controls a first subset of word lines that includes word line 303 and a plurality of other word lines. If word line 303 is not selected for access (but another word line in the first subset of word lines is selected for access), then row address decoder 410 provides logic low values for both the X_(i) and X_(j)# signals. Under these conditions, the gates of pull up and pull down transistors 401 and 403 are maintained at logic low states by n-channel transistor 404. Note that the gate of transistor 404 is connected to word line 303, which is maintained at a logic high value when word line 303 is not being accessed. As a result, transistor 404 is turned on when word line 303 is not being accessed, thereby coupling the gates of transistors 401 and 403 to the V_(SS) supply voltage. The V_(SS) supply voltage turns on pull up transistor 401 and turns off pull down transistor 403, thereby maintaining a logic high voltage (i.e., V_(CCB)) on word line 303.

During the data retention state (i.e., when none of the word lines in the first subset of word lines is being accessed), row address decoder 410 drives the X_(j)# signal high, thereby turning on n-channel transistor 405. Turned on transistor 405 couples the gates of pull up and pull down transistors 401 and 403 to the V_(SS) supply voltage. As a result, pull up transistor 401 is turned on and pull down transistor 403 is turned off. At this time, transistor 401 couples word line 303 to receive the V_(CCB) voltage, thereby turning off access transistor 301 of memory cell 300 (or the access transistor of memory cell 40).

Pull down transistor 403 is selected to be an n-channel transistor to speed up the turn on of word line 303. However, in the present embodiment, the bulk of all n-channel transistors formed are connected to receive the V_(SS) supply voltage. (See, FIG. 3B, which illustrates p-type substrate 306 coupled to receive the V_(SS) supply voltage). As a result, the minimum value of the V_(SSB) control voltage is limited to one diode voltage drop below the V_(SS) supply voltage (i.e., one diode voltage drop below ground). Moreover, each row of memory cells has an associated word line driver. There are usually numerous rows of memory cells (e.g., more than 100) in an embedded memory. As a result of the large number of word line drivers, the reverse junction leakage between the substrate and the sources of the n-channel pull down transistors (such as pull down transistor 403) can be quite substantial. The reverse junction leakage increases exponentially as the V_(SSB) control voltage becomes more negative. To limit the reverse junction leakage, the word line drivers are divided into groups of 32, with each group being coupled to a common V_(SSB) coupling circuit 500.

FIG. 6 is a block diagram illustrating a word line driver system 500 that includes a first plurality of word line drivers 400, a second plurality of V_(SSB) coupling circuits 600, a V_(CCB) voltage generator 700 and a V_(BBS) voltage generator 800. Each V_(SSB) coupling circuit 500 is coupled to a corresponding group of 32 word line drivers 400. As described in more detail below, when one of the word lines in a group is to be turned on, the corresponding V_(SSB) coupling circuit 500 is controlled to couple the V_(BBS) voltage generator 800 to the corresponding group of 32 word line drivers. As a result, the V_(SSB) coupling circuit routes the negative boosted voltage V_(BBS) generated by the V_(BBS) voltage generator 800 as the V_(SSB) voltage. As described in more detail below, V_(BBS) voltage generator 800 generates a V_(BBS) voltage having a value less than one threshold voltage (V_(tp)) below the V_(SS) supply voltage. When none of the word lines in a group is to be turned on, the corresponding V_(SSB) coupling circuit 500 is controlled to couple the V_(SS) voltage supply to the corresponding group of 32 word line drivers. That is, the V_(SSB) coupling circuit 500 routes the V_(SS) supply voltage as the V_(SSB) voltage.

Because only a subset of the word line drivers 400 is coupled to receive the V_(BBS) voltage at any given time, the reverse junction leakage is substantially reduced. Moreover, by limiting the V_(BBS) voltage to a voltage less than one threshold voltage below the V_(SS) supply voltage, the reverse junction leakage is further reduced.

FIG. 7 is a schematic diagram of V_(SSB) coupling circuit 600 in accordance with one embodiment of the present invention. V_(SSB) coupling circuit 600 includes p-channel transistors 601-603, n-channel transistor 604 and inverters 611-614. P-channel transistor 601 is connected between the V_(SSB) and V_(BBS) voltage supply lines. The gate of transistor 601 is coupled to node N2. Transistor 602 is connected between node N2 and the V_(BBS) voltage supply line. P-channel transistor 603 is connected as a capacitor, with its source and drain commonly connected to node N1, and its gate connected to node N2. N-channel transistor 604 is connected between the V_(SSB) voltage supply line and the V_(SS) voltage supply terminal. The gate of transistor 604 is connected to node N1. Inverters 611-614 are connected in series, with inverter 611 receiving the X_(j)# signal from row address decoder 410, and inverter 614 providing the delayed X_(j)# signal to node N1.

FIG. 8 is a waveform diagram illustrating various signals generated during the operation of V_(SSB) coupling circuit 600.

Prior to activating word line 303, the X_(i) signal is low and the X_(j)# signal is high. Under these conditions, the chain of inverters 611-614 provides a logic high signal to node N1, thereby turning on n-channel transistor 604. As a result, the V_(SSB) supply line is maintained at the V_(SS) supply voltage (0 Volts). Also, prior to activating word line 303, the sub-threshold leakage of transistor 602 pulls node N2 to a voltage less than one threshold voltage drop (V_(t)) above V_(BBS), thereby preventing transistor 601 from turning on.

As described above in connection with FIG. 5, the X_(i) signal is driven high and then the X_(j)# signal is driven low to activate word line 303. Under these conditions, pull down transistor 403 (FIG. 5) of word line driver 400 turns on, thereby coupling word line 303 to the V_(SSB) supply line. Immediately after transistor 403 is turned on, the low state of the X_(j)# is propagating through the chain of inverters 611-614 and has not reached node N1. During this time, n-channel transistor 604 remains on, coupling the V_(SSB) supply line to receive the V_(SS) supply voltage. Also during this time, the high state of node N1 pulls the source and drain of capacitor-coupled transistor 603 to a high state. Transistor 602 is connected as an MOS diode with its gate and drain connected to the V_(BBS) supply line. Transistor 602 therefore limits the voltage at node N2 to no more than one threshold voltage (V_(t)) above the V_(BBS) voltage, or to a potential approximately equal to the V_(SS) supply voltage. Consequently, capacitor 603 is initially charged to a voltage approximately equal to the V_(dd) supply voltage (i.e., the voltage across transistor 603 is approximately equal to V_(dd)).

When the low state of the X_(j)# signal reaches node N1, transistor 604 is turned off, thereby de-coupling the V_(SSB) voltage supply line from the V_(SS) voltage supply terminal. The low voltage at node N1 also causes capacitor 603 to pull node N2 down to a voltage equal to −V_(dd). The −V_(dd) voltage at node N2 turns on p-channel transistor 601, thereby coupling the V_(SSB) voltage supply line to the V_(BBS) voltage supply line. Note that only 32 word line drivers are coupled to the V_(BBS) voltage supply line (and therefore the V_(BBS) voltage generator 800) at this time. Because a relatively small number of word line drivers are connected to the V_(BBS) supply line, the resulting junction leakage is relatively small.

The on-chip V_(BBS) voltage generator 800 is designed to maintain V_(BBS) at approximately −0.3 Volts below the V_(SS) supply voltage despite the junction leakage. Note that during the activation of word line 303, this word line 303 is initially coupled to receive the V_(SS) supply voltage. When the voltage of word line 303 drops below the V_(dd) supply voltage, then word line 303 is coupled to receive the negative boosted voltage V_(BBS). This limits the source-to-drain voltage of word line pull down transistor 403 to be less than V_(CCB) minus V_(BBS), thereby preventing transistor 403 from being exposed to high voltage stress.

To de-activate word line 303, the X_(j)# signal is driven high by row address decoder 410. In response, pull up transistor 401 in word line driver 400 is turned on, thereby pulling up word line 303 to the V_(CCB) voltage. In V_(SSB) coupling circuit 600, the high state of the X_(j)# signal propagates through the delay chain formed by inverters 611-614, thereby providing a high voltage at node N1 which turns on transistor 604. The high voltage at node N1 also couples node N2 to a voltage of about V_(SS), thereby turning off transistor 601. Under these conditions, the V_(SSB) voltage supply line is coupled to the V_(SS) voltage supply terminal.

Voltage Reference Generation

The V_(CCB) and V_(SSB) voltages are generated by on-chip charge pump circuits in accordance with one embodiment of the present invention. FIG. 9A is a block diagram showing the general construction of the V_(CCB) and V_(SSB) boosted voltage generators 700 and 800 in accordance with one embodiment of the present invention. Each of the V_(CCB) and V_(SSB) boosted voltage generators consists of a ring oscillator 801, a charge pump 802 and a pump controller 803, which controls the operation of the oscillator 801 and thus charge pump 802. Ring oscillator 801 and charge pump 802 are conventional elements that are well documented in references such as U.S. Pat. Nos. 5,703,827 and 5,267,201.

FIG. 9B is a simplified schematic diagram of a charge pump control circuit 901 used in a conventional positive boosted voltage generator. Charge pump control circuit 901 includes a p-channel transistor 911 having a gate coupled to receive the V_(dd) supply voltage, a source and bulk coupled to receive the positive boosted voltage V_(boost+), and a drain coupled to a reference current source 912. The drain of transistor 911 is also connected to the Inhibit control line. Current source 912 can be replaced with a resistor.

When the V_(boost+) voltage is higher than the V_(dd) supply voltage by one threshold voltage (V_(tp)), transistor 911 is turned on. The source current from transistor 911 is compared to the reference current I_(REF) provided by current source 912. As the potential difference between the V_(boost+) and V_(dd) voltages increases, the source current from transistor 911 increases. When the source current is larger than the reference current I_(REF), the Inhibit control line is coupled to receive the V_(boost+) voltage. The high state of the Inhibit signal disables the ring oscillator 801, thereby shutting down the charge pump 802 and stopping V_(boost+) from going higher. Depending on the magnitude of the reference current I_(REF), the boosted voltage V_(boost+) can be regulated at a voltage equal to the V_(dd) supply voltage plus one threshold voltage (V_(tp)) or higher. Note that the bulk of transistor 911 is coupled to receive the V_(boost+) voltage so that the source-to-bulk junction of this transistor is not forward biased. However, this connection is possible only when the bulk of transistor 911 is an N-well which can be isolated from the substrate, or when transistor 911 is formed in an n-type substrate that is biased to a voltage equal to or more positive than V_(boost+).

FIG. 9C is a simplified schematic diagram of a charge pump control circuit 902 used in a conventional negative boosted voltage generator. Charge pump control circuit 902 includes an n-channel transistor 921 having a gate coupled to receive the V_(SS) supply voltage, a source and bulk coupled to receive the negative boosted voltage V_(boost−), and a drain coupled to a reference current source 922. The drain of transistor 921 is also connected to the Inhibit# control line. Current source 922 can be replaced with a resistor.

When the V_(boost−) voltage is lower than the V_(SS) supply voltage by one threshold voltage (V_(tn)), transistor 921 is turned on. The drain current from transistor 921 is compared to the reference current I_(REF) provided by current source 922. As the potential difference between V_(boost−) and V_(SS) increases, the drain current from transistor 921 increases. When the drain current is larger than the reference current I_(REF), the Inhibit# control line is coupled to receive the V_(boost−) voltage. The low state of the Inhibit# signal disables the ring oscillator 801, thereby shutting down the charge pump 802 and stopping the V_(boost−) voltage from going more negative. Depending on the magnitude of the reference current I_(REF), the V_(boost−) voltage can be regulated at a voltage equal to V_(SS) minus one threshold voltage (V_(tn)) or more. Note that the bulk of transistor 921 is coupled to receive the V_(boost−) voltage so that the source-to-bulk junction of this transistor is not forward biased. This connection is possible only when the bulk of transistor 921 is a p-well which can be isolated from the substrate, or when transistor 921 is formed in a p-type substrate that is biased a voltage equal to or more negative than V_(boost−).

Charge pump control circuits 901 and 902 cannot co-exist in a conventional logic process because such a process has the limitation that only one type of transistor can be isolated in a well. That is, both n-wells and p-wells are not available in a conventional logic process as defined herein. Moreover, because the p-type substrate of memory cell 300 is biased at the V_(SS) voltage (FIG. 3B), the p-type substrate of memory cell 300 cannot be biased at a voltage equal to or more negative than the negative boosted word line voltage V_(BBS). Furthermore, because charge pump control circuit 901 results in a V_(boost−) voltage greater than or equal to V_(dd) plus V_(tp), this charge pump control circuit 901 cannot generate a V_(boost−) voltage greater than the V_(dd) supply voltage, but less than the V_(dd) supply voltage plus the threshold voltage V_(tp) as required by the present invention.

Similarly, because charge pump control circuit 902 results in a V_(boost−) voltage less than or equal to the V_(SS) supply voltage minus the threshold voltage V_(tn), this charge pump control circuit 902 cannot generate a V_(boost−) voltage less than the V_(SS) supply voltage, but greater than the V_(SS) supply voltage minus the absolute value of the threshold voltage V_(tn) as required by the present invention.

FIG. 10 is a schematic diagram of a V_(CCB) charge pump control circuit 1000 in accordance with the one embodiment of the present invention. V_(CCB) charge pump control circuit 1000 is used to replace charge pump control circuit 803 (FIG. 9A), thereby creating a V_(CCB) reference voltage generation circuit that is capable of generating the desired V_(CCB) voltage. V_(CCB) charge pump control circuit 1000 includes p-channel transistors 1001-1003 and reference current sources 1004-1005. The source of p-channel transistor 1001 is coupled to receive the V_(dd) supply voltage, and the gate and drain of p-channel transistor 1001 are commonly connected to reference current source 1004. P-channel transistor 1001 is thereby connected as a diode between the V_(dd) voltage supply and reference current source 1004. Reference current source 1004 generates a reference current, I_(REFP), which establishes a reference voltage, V_(REFP), on the gate of p-channel transistor 1002.

P-channel transistor 1001 has a channel width of W_(p). P-channel transistors 1001 and 1002 have the same channel lengths. However, p-channel transistor 1002 has a channel width of m times W_(p), where m is a multiplying constant. The drain of transistor 1002 is connected to another reference current source 1005, which generates a reference current, I_(REFP1).The source of transistor 1002 is connected to node V_(p). Node V_(p) is also connected to the drain and gate of p-channel transistor 1003. The source of transistor 1003 is connected to receive the positive boosted voltage V_(CCB) from charge pump 802. If the reference currents I_(REFP) and I_(REFP1 V) _(boost−) are equal, and transistor 1002 has the same channel width as transistor 1001 (i.e., m=1), then node V_(p) will be held at a voltage equal to the V_(dd) supply voltage. Under these conditions, the positive boosted voltage V_(CCB) will be higher than the V_(dd) supply voltage by a voltage greater than the absolute value of the threshold voltage V_(tp) of p-channel transistor 1003.

In the present embodiment, reference current I_(REFP) is set approximately equal to reference current I_(REFP1), and the multiplying constant m is set equal to four. Because the channel length of transistor 1002 is four times longer than the channel length of transistor 1001, the source-to-gate voltage of transistor 1002 is less than the source-to-gate voltage of transistor 1001. As a result, the voltage on node V_(p) is less than the V_(dd) supply voltage. For example, if reference currents I_(REFP) and I_(REFP1) are both set equal to about 50 μA, then the voltage on node V_(p) will be about 0.2 Volts less than the V_(dd) supply voltage. The channel width of transistor 1003 is selected to be relatively large (e.g., on the order of 50 μm) such that the source-to-gate voltage of transistor 1003 is approximately equal to the threshold voltage of transistor 1003 (e.g., 0.5 Volts). As a result, the V_(CCB) voltage is maintained at a voltage about 0.3 Volts greater than the V_(dd) supply voltage. The V_(CCB) voltage is therefore less than one threshold voltage greater than the V_(dd) supply voltage.

In another embodiment, p-channel transistor 1003 can be eliminated, such that the V_(CCB) voltage is provided directly to node V_(p). However, in this embodiment, the channel width of transistor 1002 must be selected to smaller than the channel width W_(p) of transistor 1001. That is, the multiplier constant m must be selected to be less than one, such that the source-to-gate voltage of transistor 1002 is greater than the source-to-gate voltage of transistor 1001 by about 0.3 Volts (or another voltage that is less than the p-channel threshold voltage).

FIG. 11 is a schematic diagram of a V_(BBS) charge pump control circuit 1100 in accordance with the one embodiment of the present invention. V_(BBS) charge pump control circuit 1100 is used to replace charge pump control circuit 803 (FIG. 9A), thereby creating a V_(BBS) reference voltage generation circuit that is capable of generating the desired V_(BBS) voltage. V_(BBS) charge pump control circuit 1100 includes n-channel transistors 1101-1102, p-channel transistor 1103 and reference current sources 1104-1105. The source of n-channel transistor 1101 is connected to receive the V_(SS) supply voltage. The drain and gate of transistor 1101 are commonly connected to reference current source 1104. Thus, transistor 1101 is connected as a diode. Reference current source 1104 is connected between the V_(dd) voltage supply and the commonly connected drain and gate drain of n-channel transistor 1101. Reference current source 1104 provides a reference current I_(REFN1) to n-channel transistor 1101. The reference current I_(REFN1) establishes a reference voltage, V_(REFN), on the gate of n-channel transistor 1102.

N-channel transistor 1101 has a channel width of W_(n). N-channel transistors 1101 and 1102 have the same channel lengths. However, n-channel transistor 1102 has a channel width of n times W_(n), where n is a multiplying constant. The drain of transistor 1102 is connected to another reference current source 1105, which generates a reference current, I_(REFN). The source of transistor 1102 is connected to node V_(N). Node V_(N) is also connected to the source of p-channel transistor 1103. The drain and gate of transistor 1103 are commonly connected to receive the negative boosted voltage V_(BBS). If the reference currents I_(REFN) and I_(REFN1) are equal, and transistor 1102 has the same channel width as transistor 1101 (i.e., n=1), then node V_(N) will be held at a voltage equal to the V_(SS) supply voltage. Under these conditions, the negative boosted voltage V_(BBS) will be regulated at a voltage approximately one threshold voltage (V_(tp)) below the V_(SS) supply voltage.

In the present embodiment, reference current I_(REFN) is set approximately equal to reference current I_(REFN1), and the multiplying constant n is set equal to four. Because the channel width of transistor 1102 is four times longer than the channel width of transistor 1101, the source-to-gate voltage of transistor 1102 is less than the source-to-gate voltage of transistor 1101. As a result, the voltage potential on node V_(N) is higher than the V_(SS) supply voltage. For example, if reference currents I_(REFN) and I_(REFN1) are both set equal to about 50 μA, then the voltage on node V_(N) will be about 0.2 Volts greater than the V_(SS) supply voltage. The channel width of transistor 1103 is selected to be relatively large (e.g., on the order of 50 μm) such that the source-to-gate voltage of transistor 1103 is approximately equal to the threshold voltage of transistor 1103 (e.g., 0.5 Volts). As a result, the V_(BBS) voltage is maintained at a voltage about 0.3 Volts less than the V_(SS) supply voltage. The V_(BBS) voltage is therefore less than one threshold voltage than the V_(SS) supply voltage.

In another embodiment, p-channel transistor 1103 can be eliminated, such that the V_(BBS) voltage is provided directly to node V_(N). However, in this embodiment, the channel width of transistor 1102 must be selected to smaller than the channel width W_(n) of transistor 1101. That is, the multiplier constant n must be selected to be less than one, such that the source-to-gate voltage of transistor 1102 is greater than the source-to-gate voltage of transistor 1101 by about 0.3 Volts (or another voltage that is less than the p-channel threshold voltage).

It is desirable to keep the V_(CCB) and V_(BBS) voltages relatively constant for variations in temperature. In general, the transistor threshold voltage V_(t) tends to decrease as the temperature increases. To compensate for this temperature effect, reference current sources 1004 and 1104 are constructed such that reference currents I_(REFP) and I_(REFN1) have negative temperature coefficients (i.e., reference currents I_(REFP) and I_(REFN1) decrease as the temperature increases).

FIG. 12 is a schematic diagram of reference current source 1004 in accordance with one embodiment of the present invention. Reference current source 1004 includes p-channel transistors 1201-1202, resistor 1203 and n-channel transistors 1204-1206. Resistor 1203 is connected between the V_(dd) voltage supply and the gate of transistor 1201, thereby setting the bias for transistor 1201. The current I_(R) through resistor 1203 is equal to the threshold voltage V_(tp) of transistor 1201 divided by the resistance of resistor 1203. The current I_(R) is therefore directly related to the threshold voltage V_(tp). The current I_(R) flows through p-channel transistor 1202 and n-channel transistor 1205.

The gate and source of transistor 1202 are coupled to the drain and gate, respectively, of transistor 1201. The voltage on the gate of transistor 1202 is translated to the drain of transistor 1202. N-channel transistors 1204-1206 each have a source terminal coupled to the V_(SS) voltage supply and a gate terminal coupled to the drain of transistor 1202, thereby forming a current mirror circuit. The current I_(R) is thereby translated to transistor 1206. As a result, the current through n-channel transistor 1206 (i.e., I_(REFP)) is directly related to the threshold voltage V_(tp) of p-channel transistor 1201.

Reference current source 1004 provides temperature compensation as follows.

As the temperature increases, the threshold voltages V_(tp) of transistors 1002 and 1003 (FIG. 10) decrease, thereby causing the V_(CCB) voltage to decrease. However, as the temperature increases, the threshold voltage V_(tp) of transistor 1201 (FIG. 12) decreases. In response, the current I_(R) decreases, thereby reducing the I_(REFP) current. As a result, the gate-to-source voltage of p-channel transistor 1001 (FIG. 10) decreases, thereby increasing the V_(REFP) voltage. The increased V_(REFP) voltage, in turn, causes the voltage V_(p) to increase, thereby increasing the V_(CCB) voltage. The temperature effect of the threshold voltage V_(tp) of transistors 1002 and 1003 is thereby partially compensated by the negative temperature coefficient of the I_(REFP) current. In this manner, reference current source 1004 provides temperature compensation to VccB pump control circuit 1000.

FIG. 13 is a schematic diagram of reference current source 1104 in accordance with one embodiment of the present invention. Because reference current source 1104 is similar to reference current source 1004 (FIG. 12), similar elements in FIGS. 12 and 13 are labeled with similar reference numbers. Thus, reference current source 1104 includes p-channel transistors 1201-1202, resistor 1203 and n-channel transistors 1204-1205. In addition, reference current source 1104 includes a p-channel transistor 1301 having a gate coupled to the gate of transistor 1201, and a source coupled to receive the V_(dd) supply voltage.

Reference current source 1104 provides temperature compensation as follows.

As the temperature increases, the threshold voltages V_(t) of transistors 1102 and 1103 (FIG. 11) decrease, thereby causing the V_(BBS) voltage to increase. However, as the temperature increases, the threshold voltage V_(tp) of p-channel transistor 1201 decreases. As a result, the current I_(R) decreases. Because transistors 1201 and 1301 are coupled to form a current mirror circuit, the decrease in the current I_(R) results in a decrease in the current I_(REFN1). A decrease in the current I_(REFN1), in turn, causes a decrease in the voltage V_(REFN) (FIG. 11). The decrease in V_(REFN) results in a decrease of the voltage V_(N), which in turn, causes a decrease in the V_(BBS) voltage. In this manner, reference current source 1104 provides temperature compensation to V_(BBS) pump control circuit 1100.

If the I_(REFP1) current is temperature independent, then reference current source 1004 (FIG. 12) mainly compensates for the temperature effect of transistor 1002, thereby leaving the temperature effect of transistor 1003 largely uncompensated. Similarly, if the I_(REFN) current is temperature independent, then reference current source 1104 (FIG. 13) mainly compensates for the temperature effect of transistor 1102, leaving the temperature effect of transistor 1103 largely uncompensated. To compensate for the uncompensated temperature effects of transistors 1003 and 1103, reference current sources 1005 and 1105 are constructed such that reference currents I_(REFP1) and I_(REFN) have positive temperature coefficients (i.e., reference currents I_(REFP1) and I_(REFN) increase as the temperature increases).

FIG. 14 is a schematic diagram of reference current source 1005 in accordance with one embodiment of the present invention. Reference current source 1005 includes p-channel transistors 1401-1403, n-channel transistors 1411-1414, PNP bipolar transistors 1421-1422 and resistor 1431. Transistors 1401, 1411 and 1421 are connected in series between the V_(dd) and V_(SS) voltage supplies. Transistors 1402, 1412 and 1422 and resistor 1431 are connected in series between the V_(dd) and V_(SS) voltage supplies. Transistor 1403 is connected in series with parallel-connected transistors 1413-1414 between the V_(dd) and V_(SS) voltage supplies. P-channel transistors 1401-1403 are configured to form a current mirror circuit, such that the same current flows through all three of these transistors 1401-1403. The emitter of transistor 1422 is selected to be m times larger than the emitter of transistor 1421, where m is a multiplying constant. In the described embodiment, the multiplying constant m is equal to 4. The multiplying constant m and the resistor value of resistor 1431 is selected such that the resultant current I_(REFP1) is approximately equal to I_(REFP). The voltages at the sources of transistors 1411 and 1412 are maintained at the same voltage by transistors 1401-1402 and 1411-1412. As a result, the voltage across transistor 1421 is equal to the voltage across resistor 1431 and transistor 1422.

The operation of reference current source 1005 is well documented in references such as “Analysis and Design of Analog Integrated Circuits”, by P. R. Gray and R. G. Meyer, pp. 330-333, which is hereby incorporated by reference. The current I_(R) through resistor 1431 is equal to V_(T)/R ln(m). V_(T)=kT/q, where k is equal to Boltzmann's constant, T is equal to absolute temperature, and q is equal to electron charge. The current through resistor 1431 is therefore directly related to temperature. The current I_(R) through resistor 1431 is translated to create the I_(REFP1) current through transistors 1403 and 1413-1414. As a result, the I_(REFP1) current is directly related to temperature. Thus, as temperature increases, the I_(REFP1) current increases. The increased I_(REFP1) current increases the gate-to-source voltages of transistors 1002 and 1003 in FIG. 10, thereby offsetting the decrease in the threshold voltage V_(tp) of transistor 1003 which occurs with increases in temperature. As described above, the decrease of the threshold voltage V_(tp) of transistor 1003 tends to decrease the V_(CCB) voltage. However, the increased I_(REFP1) current tends to increase the V_(CCB) voltage. The net result is that the V_(CCB) voltage is maintained relatively constant throughout the operating temperature range.

FIG. 15 is a schematic diagram of reference current source 1105 in accordance with one embodiment of the present invention. Reference current source 1105 includes p-channel transistors 1401-1402 and 1501, n-channel transistors 1411-1412, PNP bipolar transistors 1421-1422 and resistor 1431. Transistors 1401-1402, 1411-1412, 1421-1422 and resistor 1432 are connected in the manner described above for FIG. 14. In addition, the gate of transistor 1501 is commonly connected to the gates of transistors 1401-1402. As described above, the current I_(R) through resistor 1431 is directly related to temperature. Thus, as the temperature increases, the I_(R) current through resistor 1431 increases. This increased current is translated to transistor 1501, thereby resulting in an increased I_(REFN) current. The increased I_(REFN) current increases the gate-to-source voltages of transistors 1102 and 1103 in FIG. 11, thereby offsetting the decrease in threshold voltage V_(tp) of transistor 1103 in FIG. 11. As described above, the decrease in the threshold voltage V_(tp) of transistor 1103 tends to increase the V_(BBS) voltage. However, the increased I_(REFN) current tends to decrease the V_(BBS) voltage. The result is that the V_(BBS) voltage is maintained relatively constant in the operating temperature range of the reference current circuit 1104.

FIG. 16 is a schematic diagram illustrating reference current circuit 1600 in accordance with another embodiment of the present invention. Reference current circuit 1600 combines reference current circuits 1004 and 1104 in a single circuit, thereby reducing the required layout area of the resulting circuit. Similar elements in FIGS. 12, 13 and 16 are labeled with similar reference numbers. Reference current circuit 1600 operates in the same manner as reference current circuits 1104 and 1104.

FIG. 17 is a schematic diagram illustrating reference current circuit 1700 in accordance with another embodiment of the present invention. Reference current circuit 1700 combines reference current circuits 1005 and 1105 in a single circuit, thereby reducing the required layout area of the resulting circuit. Similar elements in FIGS. 14, 15 and 17 are labeled with similar reference numbers. Reference current circuit 1700 operates in the manner as reference current circuits 1005 and 1105.

The preferred embodiment described above uses PMOS transistors for the memory cells. The p-channel transistors are fabricated in N-well on P-substrate. In another embodiment, the memory cells can be fabricated using NMOS transistors. In such an embodiment, the word line is activated high and deactivated low.

FIG. 18 is a schematic diagram illustrating word line driver circuit 1600 and a V_(BBC) coupling circuit 1800 that can be used to drive memory cells constructed from NMOS transistors. Word line driver circuit 1600 includes p-channel pull-up transistor 401 and n-channel pull-down transistor 403, which were described above in connection with word line driver 400 (FIG. 5). The remainder of word line driver 1600 is a reciprocal circuit of word line driver 400. The reciprocal circuit is obtained by replacing PMOS transistors NMOS transistors, replacing NMOS transistors with PMOS transistors, replacing connections to the V_(dd) voltage supply with connections to the V_(SS) voltage supply, and replacing connections to the V_(SS) voltage supply with connections to the V_(dd) voltage supply. Thus, in addition to pull up and pull down transistors 401 and 403, word line driver 1600 includes n-channel transistor 1601, p-channel transistors 1602-1603 and row address decoder 1610.

N-channel pull-down transistor 403 of word line driver 400 is coupled directly to V_(BBS) voltage generator 800. In this embodiment, the V_(BBS) voltage generator provides a V_(BBS) voltage about −0.3 V below the V_(SS) supply voltage. The p-channel pull-up transistor 401 of word line driver 400 is coupled to receive a V_(BBC) voltage from V_(BBC) coupling circuit 1800. Row address decoder 1610 provides control signals X_(i)# and X_(j), which are the inverse of the control signals X_(i) and X_(j)# provided by row address decoder 410 (FIG. 5).

V_(BBC) coupling circuit 1800 is the reciprocal the coupling circuit 600 of FIG. 7. Thus, V_(BBC) coupling circuit 1800 includes n-channel transistors 1801-1803, p-channel transistor 1804 and inverters 1811-1814, as illustrated.

Prior to activating word line 303, the X_(i)# signal is high and the X_(j) signal is low. Under these conditions, transistor 1602 is turned on, thereby applying the Vdd supply voltage to the gates of transistors 401 and 403. As a result, pull-down transistor 403 turns on, thereby providing the VBBS voltage to word line 303. Also under these conditions, the chain of inverters 1811-1814 provides a logic low signal to node N1, thereby turning on p-channel transistor 1804. As a result, the V_(BBC) supply line is maintained at the V_(dd) supply voltage. Also, prior to activating word line 303, the sub-threshold leakage of transistor 1802 pulls node N2 to a voltage greater than one threshold voltage drop (V_(t)) below V_(CCB), thereby preventing transistor 1801 from turning on.

The X_(i)# signal is driven low and then the X_(j) signal is driven high to activate word line 303. Under these conditions, pull up transistor 401 turns on, thereby coupling word line 303 to the V_(BBC) voltage coupling circuit 1800. Immediately after transistor 401 is turned on, the high state of the X_(j) signal is propagating through the chain of inverters 1811-1814 and has not reached node N1. During this time, p-channel transistor 1804 remains on, coupling the V_(BBC) supply line to receive the V_(dd) supply voltage. Also during this time, the low state of node N1 pulls the source and drain of capacitor-coupled transistor 1803 to a low state. Transistor 1802 is connected as an MOS diode with its gate and drain connected to the V_(CCB) supply line. Transistor 1802 therefore limits the voltage at node N2 to no more than one threshold voltage (V_(t)) below the V_(CCB) voltage, or to a potential approximately equal to the V_(dd) supply voltage. Consequently, capacitor 1803 is initially charged to a voltage approximately equal to the V_(dd) supply voltage (i.e., the voltage across transistor 1803 is approximately equal to V_(dd)).

When the high state of the X_(j) signal reaches node N1, transistor 1804 is turned off, thereby de-coupling the V_(BBC) voltage supply line from the V_(dd) voltage supply terminal. The high voltage at node N1 also causes capacitor 1803 to pull node N2 up to a voltage equal to 2V_(dd). The 2V_(dd) voltage at node N2 turns on n-channel transistor 1801, thereby coupling the V_(CCB) voltage supply line to the V_(BBC) voltage supply line.

Although the invention has been described in connection with several embodiments, it is understood that this invention is not limited to the embodiments disclosed, but is capable of various modifications which would be apparent to a person skilled in the art. Thus, the invention is limited only by the following claims. 

What is claimed is:
 1. A dynamic random access memory (DRAM) cell comprising: a semiconductor region having a first conductivity type; a gate dielectric layer located over the semiconductor region; a gate electrode located over the gate dielectric layer, the gate electrode comprising a first metal silicide region; a drain region of a second conductivity type, opposite the first conductivity type, located in the semiconductor region and aligned with the gate electrode; a second metal silicide region located on and continuous with the drain region, wherein the first and second metal silicide regions are formed by a single refractory metal layer; a source region of the second conductivity type located in the semiconductor region and aligned with the gate electrode, the source region being substantially free of metal silicide; a crown electrode having a base that contacts the source region and walls that extend vertically from the base region, away from the source region; a dielectric layer located over the crown electrode, wherein the dielectric layer extends over at least interior surfaces of the walls; and a plate electrode located over the dielectric layer, wherein the plate electrode extends over at least interior surfaces of the walls.
 2. The DRAM cell of claim 1, wherein the plate electrode comprises a third metal silicide region, wherein the first, second and third metal silicide regions are formed by a single refractory metal layer.
 3. The DRAM cell of claim 1, wherein the drain region is more heavily doped than the source region.
 4. The DRAM cell of claim 1, wherein the gate electrode, the crown electrode and the plate electrode comprise polycrystalline silicon.
 5. The DRAM cell of claim 1, wherein the crown electrode has a cylindrical shape.
 6. The DRAM cell of claim 1, further comprising sidewall spacers formed adjacent to the gate electrode.
 7. The DRAM cell of claim 6, wherein the source region is completely covered by the sidewall spacers and the crown electrode.
 8. The DRAM cell of claim 1, wherein the dielectric layer and the plate electrode extend over exterior surfaces of the walls.
 9. A dynamic random access memory (DRAM) cell comprising: a semiconductor region having a first conductivity type; a gate dielectric layer located over the semiconductor region; a gate electrode located over the gate dielectric layer, the gate electrode comprising a first metal silicide region; a drain region of a second conductivity type, opposite the first conductivity type, located in the semiconductor region and aligned with the gate electrode; a second metal silicide region located on and continuous with the drain region, wherein the first and second metal silicide regions are formed by a single refractory metal layer; a source region of the second conductivity type located in the semiconductor region and aligned with the gate electrode, the source region having a different dopant concentration than the drain region; a crown electrode having a base that contacts the source region and walls that extend vertically from the base region, away from the source region; a dielectric layer located over the crown electrode, wherein the dielectric layer extends over at least interior surfaces of the walls; and a plate electrode located over the dielectric layer, wherein the plate electrode extends over at least interior surfaces of the walls.
 10. The DRAM cell of claim 9, wherein the plate electrode comprises a third metal silicide region, wherein the first, second and third metal silicide regions are formed by a single refractory metal layer.
 11. The DRAM cell of claim 9, wherein the source region is substantially free of metal silicide.
 12. The DRAM cell of claim 9, wherein the gate electrode, the crown electrode and the plate electrode comprise polycrystalline silicon.
 13. The DRAM cell of claim 9, further comprising sidewall spacers formed adjacent to the gate electrode.
 14. The DRAM cell of claim 13, wherein the source region is completely covered by the sidewall spacers and the crown electrode.
 15. The DRAM cell of claim 9, wherein the drain region is more heavily doped than the source region. 